Anutgan, M. Et Al. 2008. Effect of heat treatment on stress and structure evolution in plasma deposited boron nitride thin films. Surface and Coating Technology , vol.202, no.13 , 3058-3066.

Anutgan, M., ÖZDEMİR, O., Atılgan, İ., & Katırcıoğlu, B., (2008). Effect of heat treatment on stress and structure evolution in plasma deposited boron nitride thin films. Surface and Coating Technology , vol.202, no.13, 3058-3066.

Anutgan, Mustafa Et Al. "Effect of heat treatment on stress and structure evolution in plasma deposited boron nitride thin films," Surface and Coating Technology , vol.202, no.13, 3058-3066, 2008

Anutgan, Mustafa Et Al. "Effect of heat treatment on stress and structure evolution in plasma deposited boron nitride thin films." Surface and Coating Technology , vol.202, no.13, pp.3058-3066, 2008

Anutgan, M. Et Al. (2008) . "Effect of heat treatment on stress and structure evolution in plasma deposited boron nitride thin films." Surface and Coating Technology , vol.202, no.13, pp.3058-3066.

@article{article, author={Mustafa Anutgan Et Al. }, title={Effect of heat treatment on stress and structure evolution in plasma deposited boron nitride thin films}, journal={Surface and Coating Technology}, year=2008, pages={3058-3066} }