Temperature Dependence of PECVD Grown Boron Nitride Film in MIS structure
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ÖZDEMİR O.
American Institute of Physics Conference Proceedings, vol.1203, pp.870-875, 2009 (SCI-Expanded)
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Publication Type:
Article / Article
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Volume:
1203
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Publication Date:
2009
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Journal Name:
American Institute of Physics Conference Proceedings
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Journal Indexes:
Science Citation Index Expanded (SCI-EXPANDED)
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Page Numbers:
pp.870-875
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Yıldız Technical University Affiliated:
Yes