Temperature Dependence of PECVD Grown Boron Nitride Film in MIS structure


ÖZDEMİR O.

American Institute of Physics Conference Proceedings, vol.1203, pp.870-875, 2009 (SCI-Expanded)

  • Publication Type: Article / Article
  • Volume: 1203
  • Publication Date: 2009
  • Journal Name: American Institute of Physics Conference Proceedings
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED)
  • Page Numbers: pp.870-875
  • Yıldız Technical University Affiliated: Yes