Investigation of Electrical Transport in PECVD grown a SiCx H Thin Film


ÖZDEMİR O., BOZKURT K., KUTLU K.

21st European Conference on Diamond, Diamond- Like Materials, Carbon Nanotubes, and Nitrides, 5 - 09 September 2010

  • Publication Type: Conference Paper / Summary Text
  • Yıldız Technical University Affiliated: Yes