Investigation of PECVD Grown Hydrogenated Amorphous Silicon Nitride film Through DLTS Measurement


ÖZDEMİR O.

Balkan Physics Letter, vol.16, 2009 (Peer-Reviewed Journal)

  • Publication Type: Article / Article
  • Volume: 16
  • Publication Date: 2009
  • Journal Name: Balkan Physics Letter
  • Yıldız Technical University Affiliated: Yes