Investigation of PECVD Grown Hydrogenated Amorphous Silicon Nitride film Through DLTS Measurement

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ÖZDEMİR O.

Balkan Physics Letter, vol.16, 2009 (Peer-Reviewed Journal)

• Publication Type: Article / Article
• Volume: 16
• Publication Date: 2009
• Journal Name: Balkan Physics Letter
• Yıldız Technical University Affiliated: Yes