The effect of high temperature annealing on Schottky diode characteristics of CoCr/n-LEC GaAs contacts


PHYSICA SCRIPTA, cilt.65, sa.1, ss.124-127, 2002 (SCI İndekslerine Giren Dergi) identifier identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 65 Konu: 1
  • Basım Tarihi: 2002
  • Doi Numarası: 10.1238/physica.regular.065a00124
  • Sayfa Sayıları: ss.124-127


The CoCr/n-GaAs Schottky contacts fabricated were annealed in the temperature range 100 to 300degreesC for 5 min and 350 to 650degreesC for 1 min, to attain reproducible and stable Schottky diodes. The thermal annealing proceeding has been seen to be useful for improving the electrical characteristics of CoCr evaporation on Liquid Encapsulated Czochralski (LEC) GaAs. With use of current voltage (I-V) techniques, the Schottky barrier height Phi(b) and ideality factor n range from 0.85 eV and 1.07 (for as-deposited sample) to 0.90 eV and 1.05 (for 400degreesC annealing) for I min, and 0.82 eV and 1.10 for 550degreesC. The contact properties of the Schottky diodes deteriorated and became nearly ohmic above 750degreesC for 1 min.