NANODOT EXPOSURE IN DIFFERENT SIZE WITH USING ELECTRON BEAM LITHOGRAPHY


Kuruoğlu F., Yavuzçetin Ö., Erol A., Çalışkan M. , Serin M.

Turkish Physical Society 32nd International Physics Congres, Muğla, Turkey, 6 - 09 September 2016

  • Publication Type: Conference Paper / Summary Text
  • City: Muğla
  • Country: Turkey
  • Yıldız Technical University Affiliated: Yes