NANODOT EXPOSURE IN DIFFERENT SIZE WITH USING ELECTRON BEAM LITHOGRAPHY | AVESİS

Yıldız Technical University Research Information System

NANODOT EXPOSURE IN DIFFERENT SIZE WITH USING ELECTRON BEAM LITHOGRAPHY

Kuruoğlu F., Yavuzçetin Ö., Erol A., Çalışkan M. , Serin M.

Turkish Physical Society 32nd International Physics Congres, Muğla, Turkey, 6 - 09 September 2016

Publication Type: Conference Paper / Summary Text
City: Muğla
Country: Turkey