Anomalous Capacitance Behavior of Sol-Gel Deposited V2O5 Film on Crystalline Silicon


BULGURCUOĞLU A. E. , GOKDEMIR F. P. , ÖZDEMİR O. , Kutlu K.

JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS, cilt.12, ss.146-151, 2017 (SCI İndekslerine Giren Dergi)

  • Cilt numarası: 12 Konu: 2
  • Basım Tarihi: 2017
  • Doi Numarası: 10.1166/jno.2017.1980
  • Dergi Adı: JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS
  • Sayfa Sayısı: ss.146-151

Özet

Sol-gel produced vanadium pentoxide (V2O5) thin film was grown over differently doped crystalline silicon (p/n c-Si) substrates and electrical characteristics were investigated through current-voltage (I-V) and capacitance-voltage (C-V) measurements within dark and light ambient. For the film over p-c-Si, capacitance behavior was explained in terms of semiconductor (V2O5)/native oxide (SiO2)/semiconductor (p-c-Si) [SIS] structure in which existence of SiO2 insulator film was verified through infrared (IR) measurement. For the film over n-c-Si, negative capacitance or inductance phenomenon, corresponded to space charge limited current regime in I-V analysis, was observed and the derived admittance expression for such issue was successfully applied for the present structure.