Similar admittance behavior of amorphous silicon carbide and nitride dielectrics within the MIS structure

ÖZDEMİR O. , Atılgan İ., Katırcıoğlu B.

Vacuum, vol.82, no.6, pp.566-573, 2008 (Journal Indexed in SCI Expanded)

  • Publication Type: Article / Article
  • Volume: 82 Issue: 6
  • Publication Date: 2008
  • Title of Journal : Vacuum
  • Page Numbers: pp.566-573