Effect of Silane - Methane Plasma Compositions on the Physical Properties of a-Si1-xCx:H Alloy

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Serin M. , Akat E., Ugur S.

Balkan Physics Letters, vol.10, no.1, pp.31-37, 2002 (Journal Indexed in ESCI)

• Publication Type: Article / Article
• Volume: 10 Issue: 1
• Publication Date: 2002
• Title of Journal : Balkan Physics Letters
• Page Numbers: pp.31-37