Effect of Silane - Methane Plasma Compositions on the Physical Properties of a-Si1-xCx:H Alloy


Serin M., Akat E., Ugur S.

Balkan Physics Letters, vol.10, no.1, pp.31-37, 2002 (Peer-Reviewed Journal)

  • Publication Type: Article / Article
  • Volume: 10 Issue: 1
  • Publication Date: 2002
  • Journal Name: Balkan Physics Letters
  • Page Numbers: pp.31-37
  • Yıldız Technical University Affiliated: Yes