Microstructure of Sputtered TiN and ZrN Coatings


Keleşoğlu E. , Mitterer C.

Berg- und Hüttenmännische Monatsheften , vol.147, no.5, pp.159-163, 2002 (International Refereed University Journal)

  • Publication Type: Article / Article
  • Volume: 147 Issue: 5
  • Publication Date: 2002
  • Title of Journal : Berg- und Hüttenmännische Monatsheften
  • Page Numbers: pp.159-163