Akademik Veri Yönetim Sistemi
Mechanical Systems And Signal Processing, cilt.153, ss.1-31, 2021 (SCI-Expanded)
Zero-power micro vibration isolators based on hybrid electromagnets, consisting of coils
and permanent magnets, have potential usage in many industrial and academic fields, such
as space laboratory operations in orbit, micro-nano assembly, clean room design, bioengineering,
stewart platforms, transportation, semiconductor manufacturing, suspension
system design, and robotic surgery platforms etc. due to providing mechanical contact free
micro vibration isolation with comparatively low energy consumption. Classical controllers
optimized in time-domain do not show satisfying disturbance rejection performance for
multi-directional mechanical disturbances varying at different frequencies. To tackle this
problem, optimization techniques in frequency-domain are needed. In recent years, linear
matrix inequality (LMI) based controllers have received lots of attention and become very
popular due to their ability to satisfy multi-objective frequency-domain requirements.
However, an experimental research including LMI based H1 and H2 feedback controllers
for a zero-power 3-DoF micro vibration isolator has not been conducted so far. In this
study, H1 and H2 controller types are employed to minimize the H1 and H2 norms of
both ground and direct disturbances for 3-DoF micro-scale vibration isolation with zeropower
objective. Moreover, the experimental setup has been designed and manufactured
to meet aforementioned goals. The design parameters of the experimental setup are explicitly
given. The effectiveness of the proposed LMI structures for 3-DoF micro vibration isolation
with zero-power problem is shown with the experimental results.