3-DoF zero power micro vibration isolation via linear matrix inequalities based on H2 and Hinf control approaches

Yalçın B. C., Erkan K.

Mechanical Systems And Signal Processing, vol.153, pp.1-31, 2021 (SCI-Expanded)

  • Publication Type: Article / Article
  • Volume: 153
  • Publication Date: 2021
  • Doi Number: 10.1016/j.ymssp.2020.107506
  • Journal Name: Mechanical Systems And Signal Processing
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus, Academic Search Premier, Aerospace Database, Communication Abstracts, Compendex, INSPEC, Metadex, zbMATH, Civil Engineering Abstracts
  • Page Numbers: pp.1-31
  • Yıldız Technical University Affiliated: Yes


Zero-power micro vibration isolators based on hybrid electromagnets, consisting of coils

and permanent magnets, have potential usage in many industrial and academic fields, such

as space laboratory operations in orbit, micro-nano assembly, clean room design, bioengineering,

stewart platforms, transportation, semiconductor manufacturing, suspension

system design, and robotic surgery platforms etc. due to providing mechanical contact free

micro vibration isolation with comparatively low energy consumption. Classical controllers

optimized in time-domain do not show satisfying disturbance rejection performance for

multi-directional mechanical disturbances varying at different frequencies. To tackle this

problem, optimization techniques in frequency-domain are needed. In recent years, linear

matrix inequality (LMI) based controllers have received lots of attention and become very

popular due to their ability to satisfy multi-objective frequency-domain requirements.

However, an experimental research including LMI based H1 and H2 feedback controllers

for a zero-power 3-DoF micro vibration isolator has not been conducted so far. In this

study, H1 and H2 controller types are employed to minimize the H1 and H2 norms of

both ground and direct disturbances for 3-DoF micro-scale vibration isolation with zeropower

objective. Moreover, the experimental setup has been designed and manufactured

to meet aforementioned goals. The design parameters of the experimental setup are explicitly

given. The effectiveness of the proposed LMI structures for 3-DoF micro vibration isolation

with zero-power problem is shown with the experimental results.