6 Degree of Freedom Control of Vibration Isolation Stage by Employing A Novel Staggered E Type Hybrid Electromagnet


ERKAN K. , KOSEKİ T.

Technical meeting on Linear Drives, IEE Japan, LD-03-76-86, 01 Eylül 2003

  • Yayın Türü: Bildiri / Tam Metin Bildiri