6 Degree of Freedom Control of Vibration Isolation Stage by Employing A Novel Staggered E Type Hybrid Electromagnet

ERKAN K., KOSEKİ T.

Technical meeting on Linear Drives, IEE Japan, LD-03-76-86, 01 September 2003

  • Publication Type: Conference Paper / Full Text
  • Yıldız Technical University Affiliated: Yes