Instability phenomenon originated from disordered layer of plasma deposited BN filmc-Si interface assessed through MIS structure by admittance measurement

ÖZDEMİR O., Anutgan M., Anutgan T. A., Atılgan İ., Katırcıoğlu B.

Semiconductor Science and Technology, vol.23, 2008 (SCI-Expanded, Scopus)

• Publication Type: Article / Article
• Volume: 23
• Publication Date: 2008
• Journal Name: Semiconductor Science and Technology
• Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
• Yıldız Technical University Affiliated: Yes