Instability phenomenon originated from disordered layer of plasma deposited BN filmc-Si interface assessed through MIS structure by admittance measurement

ÖZDEMİR O., Anutgan M., Anutgan T. A., Atılgan İ., Katırcıoğlu B.

Semiconductor Science and Technology, vol.23, 2008 (SCI-Expanded)

  • Publication Type: Article / Article
  • Volume: 23
  • Publication Date: 2008
  • Journal Name: Semiconductor Science and Technology
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Yıldız Technical University Affiliated: Yes