Admittance analyis of an MIS structure made with PECVD deposited a-SiNx:H films


Özder S., ÖZDEMİR O., Katırcıoğlu B.

JOURNAL OF NON-CRYSTALLINE SOLIDS, vol.249, pp.131-144, 1999 (SCI-Expanded)

  • Publication Type: Article / Article
  • Volume: 249
  • Publication Date: 1999
  • Journal Name: JOURNAL OF NON-CRYSTALLINE SOLIDS
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Page Numbers: pp.131-144
  • Yıldız Technical University Affiliated: No