Admittance analyis of an MIS structure made with PECVD deposited a-SiNx:H films


Özder S., ÖZDEMİR O. , Katırcıoğlu B.

JOURNAL OF NON-CRYSTALLINE SOLIDS, vol.249, pp.131-144, 1999 (Journal Indexed in SCI Expanded)

  • Publication Type: Article / Article
  • Volume: 249
  • Publication Date: 1999
  • Title of Journal : JOURNAL OF NON-CRYSTALLINE SOLIDS
  • Page Numbers: pp.131-144