Effect of heat treatment on stress and structure evolution in plasma deposited boron nitride thin films

Anutgan M., ÖZDEMİR O., Atılgan İ., Katırcıoğlu B.

Surface and Coating Technology, vol.202, no.13, pp.3058-3066, 2008 (SCI-Expanded)

  • Publication Type: Article / Article
  • Volume: 202 Issue: 13
  • Publication Date: 2008
  • Journal Name: Surface and Coating Technology
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED)
  • Page Numbers: pp.3058-3066
  • Yıldız Technical University Affiliated: Yes