Effect of heat treatment on stress and structure evolution in plasma deposited boron nitride thin films
Surface and Coating Technology, vol.202, no.13, pp.3058-3066, 2008 (SCI-Expanded)
- Publication Type: Article / Article
- Volume: 202 Issue: 13
- Publication Date: 2008
- Journal Name: Surface and Coating Technology
- Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED)
- Page Numbers: pp.3058-3066
- Yıldız Technical University Affiliated: Yes